中文版 | English
CSpace
Additive manufacturing of millimeter-scale micron-accuracy 3D structures
Yang, Hua1,3; Zhao, Yuan-Yuan2; Jin, Feng1; Liu, Jie1; Dong, Xian-Zi1; Zheng, Mei-Ling1; Duan, Xuan-Ming2; Zhao, Zhen-Sheng1
2019
摘要In this work, we demonstrate a developed 3D printing based on two-photon polymerization for achieving millimeter-scale, micron-accuracy 3D structures (MM-3DS), which combines the femtosecond laser of 800 nm and low magnification objective lens of 10×. The commercial photoresist SU-8 is used in 3D printing system for improving mechanical strength and chemical stability of MM-3DS. The 3D microstructures are preprogrammed and optimized by considering the scanning mode and experiment parameters. During 3D printing process, micron features are written within the interior of SU-8 film via localized polymerization driven by nonlinear two-photon absorption process. By the 3D movement in ∼1 mm scale of the focused beam, a customized MM-3DS can be produced. We have fabricated a customized MM-3DS with a size of 1.6 mm and an accuracy of 10 μm. The influence of volume for the printing structures Vs on the printing time T exhibits a linear behavior, indicating that the printing speed is 0.248 mm3/h under the current conditions. This technology offers a flexible and low-cost method of generating highly customizable, precisely controlled MM-3DS, which is promising for the manufacture of complex functional structures and devices for the microfluidics, microelectronics, photonics and so on. © 2019 SPIE.
语种英语
DOI10.1117/12.2506103
会议(录)名称9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-Limited Plasmonic Lithography and Innovative Manufacturing Technology, AOMATT 2018
收录类别EI
会议地点Chengdu, China
会议日期June 26, 2018 - June 29, 2018