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	Synthesis and interface structures of Ti-Al-Si-N coatings
	Wang, Gengzhu1; Chen, Tian2; Xie, Zhiwen1,2; Song, Xiaohang3; Gao, Xu1; Yu, Xiaoguang1; Song, Hua1
	2015
摘要	The Ti-Al-Si-N coatings were synthesized by multi-plasma immersion ion implantation and deposition (MPIIID). The doping of Si and Al on the interface structures and mechanical property of the composite coatings were investigated. The as-deposited Ti-Al-Si-N coatings were characterized with X-ray diffraction, energy dispersive spectroscopy, X-ray photoelectron spectroscopy, high resolution transmission electron microscopy, atomic force microscope and mechanical probes. The results show that the Si-doping strongly affects the micro- and phase structures of the super-hard Ti-Al-Si-N coatings, with TiAlN nano-grains embedded in Si3N4 layer. For example, as the Si-content increased, the TiAlN grain-size decreased and the Si3N4 layer thickened. At a low Si-content, the Si3N4 layer, thinner than 1 nm, crystallized and formed a coherent interface with the TiAlN grains, the hardness of the Ti-Al-Si-N coatings was found to be 40 GPa; but the hardness dropped down to 29 GPa because a 2 nm thick amorphous Si3N4 layer formed at a higher Si-content. ©, 2015, Science Press. All right reserved.
DOI	10.13922/j.cnki.cjovst.2015.02.10
发表期刊	Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
ISSN	16727126
卷号	35期号:2页码:179-183
通讯作者	Xie, Zhiwen
收录类别	EI
语种	中文