KMS Chongqing Institute of Green and Intelligent Technology, CAS
| Investigation of Ti-DLC film for the near infrared photodetector | |
Li, Pei1,2,3; Zhang, Xinru2,3; Chen, Shi2,3; Yu, Leyong2,3 ; Feng, Shuanglong1,2,3
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| 2023-12-01 | |
| 摘要 | Diamond-like carbon (DLC) combines the excellent properties of diamond and graphite and has the feature of a tunable band gap, which can be used as a photodetector. Here, we propose a Ti-DLC/Si heterojunction photodetector. Uniform DLC films were co-deposited on silicon by magnetron sputtering, and the effect of titanium doping on the films was investigated. Meanwhile, Ti-DLC/Si heterojunctions were prepared, and the optical responsiveness of DLC devices with different thicknesses was investigated in the 1550 nm band. The device exhibited a detectivity of 1.16 x 108 Jones, a response time of 5 ms for rising edges and 3 ms for falling edges at a DLC thickness of 90 nm. This work presents a broad application prospect in the field of photodetectors. |
| 关键词 | Diamond -like carbon Titanium doping Heterojunction Near-infrared photodetector |
| DOI | 10.1016/j.diamond.2023.110478 |
| 发表期刊 | DIAMOND AND RELATED MATERIALS
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| ISSN | 0925-9635 |
| 卷号 | 140页码:7 |
| 通讯作者 | Feng, Shuanglong(fengshuanglong@cigit.ac.cn) |
| 收录类别 | SCI |
| WOS记录号 | WOS:001094965100001 |
| 语种 | 英语 |
