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TiO2-x films for bolometer applications: recent progress and perspectives
Zhang, Qiming1; Yan, Ruiyang2; Peng, Xiaoyan1,3; Wang, YuShui4; Feng, Shuanglong2
2022
摘要The bolometer is widely used in military and civilian infrared imaging due to its advantages of non-cooling, small size and portability. Thermosensitive materials seriously affect the performance of bolometers. As a kind of heat-sensitive material, the TiO2-x material has the advantages of good thermal stability, large-area preparation, and compatibility with the complementary metal-oxide semiconductor (CMOS) process. However, there is almost no review on the application of titanium oxide for bolometers. In this paper, we introduce the bolometer's main thermal and photoelectric performance parameters and the critical technologies to manufacture the bolometer. Finally, we will particularly emphasize the effects of preparation process parameters of TiO2 on the performance parameters temperature coefficient of resistance (TCR), 1/f noise, etc.
关键词bolometer TiO2-x TCR
DOI10.1088/2053-1591/ac4327
发表期刊MATERIALS RESEARCH EXPRESS
卷号9期号:1页码:27
通讯作者Peng, Xiaoyan(pengxy2015@swu.edu.cn) ; Feng, Shuanglong(fengshuanglong@cigit.ac.cn)
收录类别SCI
WOS记录号WOS:000784479600001
语种英语